Electrical properties of ZrO/sub 2/ thin film prepared by sol-gel method

ZrO/sub 2/ thin films were prepared by the sol-gel method using metal alkoxide (Zr(O-n-Bu)/sub 4/). These films were monoclinic crystalline phase ZrO/sub 2/, which cannot be prepared by general methods. The electrical properties of ZrO/sub 2/ thin film show good electrical insulation. The ZrO/sub 2/ thin film is expected to serve as capacitor and coating for insulating film.<
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