An RF-MEMS device with a lateral field-emission detector

We propose a new device that utilizes the field-emission effect as a signal-detecting mechanism for RF-MEMS (radio-frequency micro electro mechanical systems) applications. The device consists of a micro electromechanical resonator of BPF (band-pass filter) characteristics and a pair of silicon tips for field-emission, both of which are monolithically integrated by the silicon micromachining technology. The present paper will show a complete set of experimental results on the field-emission current that was controlled by the micromechanical structure, including the latest report on improved fabrication processes for sharper emission tips.