MOEMS variable optical attenuator with improved dynamic characteristics based on robust design

The design and preliminary data of a novel microoptoelectromechanical systems variable optical attenuator (VOA) driven by a pair of V-beam electrothermal actuators is described. This VOA deploys a face-to-face arranged pair of 45/spl deg/ tilted mirrors in front of two coaxially aligned lensed fibers to form retro-reflection planar light path for attenuation. The initial insertion loss is 0.7 dB at 1550 nm and the maximum dynamic range of attenuation is 50 dB, respectively. The polarization-dependent loss is measured as 0.15 dB at 20-dB attenuation. The dynamic attenuation deviation is less than /spl plusmn/0.36 dB at 20-dB attenuation with respect to 20-G shock of periodical mechanical vibration at 1 K Hz, in which it complies with requirements of the Telcordia GR1221 regulations.