Towards thin film module production using a simplified CIS process

A pilot production for large area thin film solar modules based on CuInS/sub 2/ (CIS) is operational in Berlin. The targeted product is a substrate type glass-glass module of 65 W/sub p/ power output. The production line consists of an inline work flow including five deposition steps. It has a projected output of up to 5 MW/sub p/. The technology is optimized for lowest complexity: sputtering techniques are used for all thickness-defining process steps preventing homogeneity issues on large areas. Rapid thermal processing is applied for compound formation avoiding an elongated tempering line. A minimized number of utilized materials and wide process windows characterize the preparation process. Analyzing the direct manufacturing costs it is shown that a level of 1.50 /spl euro//W/sub p/ is feasible in industrial production already at a capacity of 5 MW/sub p//a.