0.2 Micron length T-shaped gate fabrication using angle evaporation

A new technique has been developed to generate sub-half-micron T-shaped gates in GaAs MESFET's. The technique uses a single-level resist and an angle evaporation process. By using this technique, T-shaped gates with lengths as short as 0.2 µm near the Schottky interface have been fabricated. Measured gate resistance from this structure was 6.1 Ω/mm gate width which is the lowest value ever reported for gates of equal length. GaAs single- and dual-gate MESFET's with 0.3 µm long T-shaped gates have also been fabricated. At 18 GHz, maximum available gain of 9.5 dB in the single-gate FET and maximum stable gain of 19.5 dB in the dual-gate device have been measured.