Optical microdevice fabrication on optical fiber by FIB-CVD

The optical microdevices on a top of optical fiber is indispensable to an optical fiber communication So far, it was reported that zone plate and microlens on a top of optical fiber were fabricated by electron beam (EB) lithography and FIB direct etching[’721. However, these methods have the following disadvantages. The resist coating ona top of optical fiber is difficult in EB lithography and a metal coating is necessary in FIB direct etching. To avoid the above problems and make the process to simplify, we applied focused- iortbeam chemical- vapor deposition (FIB-CVD) to make optical microdevices on a top of optical fiber