Micromachined bolometer with single-crystal silicon diode as temperature sensor

An infrared-sensitive micromachined bolometer integrated with a single-crystal silicon diode as temperature sensor was designed and fabricated. An island of single-crystal silicon containing the diode underneath the bolometer membrane was centered and thermally isolated from the substrate. Diode temperature sensitivity biased by constant current was found to be -2.6 mVK/sup -1/ and bolometer thermal conductivity of 2.0/spl times/10/sup -7/ WK/sup -1/. Due to its negligible self-heating effect, the bolometer could be biased permanently and its output signal integrated for an unlimited time. The utilization of diode-based bolometer as focal plane array basic block is discussed.