A new integral-equation-based, full-wave layered interconnect simulator

Full-wave simulators are required for accurate modeling of high-performance, 3D interconnects. However, current full-wave solvers are too inefficient to handle large interconnect problems. In this paper, a new efficient, integral-equation-based, full-wave layered interconnect simulator (UA-FWLIS) is developed by using analytical methods and incorporating physics-based expansion function. The accuracy of the simulator developed using this strategy is validated by comparing with commercial simulator tools.