A stochastic integral equation method for modeling the rough surface effect on interconnect capacitance

In This work we describe a stochastic integral equation method for computing the mean value and the variance of capacitance of interconnects with random surface roughness. An ensemble average Green's function is combined with a matrix Neumann expansion to compute nominal capacitance and its variance. This method avoids the time-consuming Monte Carlo simulations and the discretization of rough surfaces. Numerical experiments show that the results of the new method agree very well with Monte Carlo simulation results.