A procedure for validating the finite element model of a piezoresistive ceramic pressure sensor

In this paper, we describe our experimental approach to the electromechanical characterization of thick-film resistors, the estimation of the resistive material's properties, and the validation of the finite element (FE) model used for the numerical analysis of ceramic pressure sensors (CPS). In order to improve the accuracy of the numerical models and increase the reliability of the simulation results a special test device containing all the essential construction details of the CPS was designed. Both the deflection of the ceramic diaphragm of the device under test and the resistance changes were measured. The numerical and experimental analyses of the specially designed test device indirectly confirmed the correctness of the FE model, which could be convenient for further virtual prototyping analyses.