An efficient formulation for substrate parasitic extraction accounting for nonuniform current distribution

In this paper, a new formulation for the extraction of substrate parasitics is derived that can account for the nonuniform current distribution on contacts without contact subdivision. This method is orders of magnitude faster than the original Green's function method. The speedup is achieved by a significantly reduced matrix size combined with the application of the discrete sine transform. The method is accurate, and is well suited for large problems.