Experimental study of metal-metal contact properties using spin on glass

Degassing data of cured spin-on glass (SOG) layers and wafer temperature measurements during the sputter etch process are given. A solution for the metal-metal contact problem using an in situ preheat step prior to a (soft) sputter etch process and subsequent metal deposition is presented. An improvement in IN-INS contact string resistance yield from approximately 40% to 99.5% could be achieved in this process.<
>