Key technologies for novel wavelength-selective photodetectors

One-Mirror-Inclined Three-Mirror-Cavity (OMITMiC) photodetector, which combines a Fabry-Perot filtering-cavity with a taper absorption-cavity, features high-speed, high quantum efficiency and ultra-narrow spectral linewidth simultaneously and allows wide range tuning when proper tuning mechanism is introduced. First fabrication and demonstration of this kind of device on GaAs substrate had been done in our laboratory. A quantum efficiency of 75% and a spectral linewidth of 0.8 nm (FWHM) were achieved with an absorption layer as thin as 0.119 /spl mu/m. Relevant micromechanical tunable Fabry-Perot filter with a tuning range about 30 nm had been achieved. Research works on the key technologies to transfer our success to InP based long wavelength device are also presented.