High frequency test structures definition for electromagnetic coupling study between two symmetrical inductors. Electrical modelling of the whole coupling between coils

High frequency test structures for electromagnetic coupling study between two symmetrical inductors are described. Results from the S/sub 12/ parameter measurement are compared to HP-Momentum electromagnetic (EM) simulations and show that coupling doesn't reach -25dB and is smaller than -40dB for a separation distance between coils higher than 200/spl mu/m. An electrical modelling of the whole coupling between coils is proposed and compared with experimental results.