Performance tuning of robust motion controllers for high-accuracy positioning systems

This paper presents a structural design method of robust motion controllers for high-accuracy positioning systems, which makes it possible to tune the performance of the whole closed-loop system systematically. First, a stabilizing control input is designed based on Lyapunov redesign for the system in the presence of uncertainty and disturbance. And adopting the internal model following control, robust internal-loop compensator (RIC) is proposed. By using the structural characteristics of the RIC, disturbance attenuation properties and the performance of the closed-loop system determined by the variation of controller gains are analyzed. Next, in order to design a robust motion controller for a high performance positioning system, dual RIC structure is proposed and it is shown that if the synthesis of the robust motion control law is performed in the RIC framework, the robust property of RIC can be naturally implanted in the feedback controller. The proposed structural design of robust motion controller provides a systematic approach to the problem of robust stability and performance requirement in the face of uncertainty. Furthermore, by allowing the tradeoffs between robust stability and performance to be quantified in a simple fashion, it can illuminate systematic design procedure of the robust motion controllers. Finally, the proposed method is verified through simulation and the performance is evaluated by experiments using a high-accuracy positioning system.