73ps si bipolar ECL circuits

THIS PAPER will cover 1.2μm Si-bipolar Emitter-Couple-Logic circuits with a minimum gate delay of 73ps. The circuits were fabricated with bipolar technology (Figure 1) featuring poly-base self-alignment, poly-emitter shallow profile, walled-emitter together with silicon-filled trench isolation and polysilicon resistors. This technology was also used to implement non-threshold logic(NTL) circuits with I/I resistors. The NTL ring oscillator gate delay was found to be 44ps.