Statistical process characterization in advanced analog IC manufacturing

The device parameter drift of a JFET operational amplifier is discussed in terms of yield loss and product quality of analog ICs. Planned statistical experimentation was used to identify process factors that were causing drift. The improvements obtained using statistical process characterization and the resultant analog IC yield enhancement are described. The scenario presented demonstrates the essential need for a statistical approach to solve complex IC manufacturing problems. The multidisciplinary approach involves statistics, device physics, process characterization, device characterization, and manufacturing.<
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