Etched mirror and groove-coupled GaInAsP/InP laser devices for integrated optics

Recent advances in wet and dry etching techniques for GaInAsP/InP laser structures allow the reproducible fabrication of planar and vertical walled facets and grooves. These elements provide efficient mirrors and interstage couplers that may provide the basis for a new generation of monolithic integrated optical devices. Initial experimental results on etched facet lasers and groove-coupled two-section lasers verify theoretical expectations.