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Improved High Frequency Response and Quality Factor of On-Chip Ferromagnetic Thin Film Inductors by Laminating and Patterning Co-Zr-Ta-B Films

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4 Author(s)
Hao Wu$^{1}$ Ira A. Fulton Schools of Engineering, School of Electrical, Computer and Energy Engineering,, Arizona State University,, Tempe,, AZ, USA ; Shirong Zhao ; Donald S. Gardner ; Hongbin Yu