A first fully integrated 5.2-GHz CMOS-based RF power harvester with an on-chip antenna is presented in this paper. The design is optimized for sensors implanted inside the eye to wirelessly monitor the intraocular pressure of glaucoma patients. It includes a five-stage RF rectifier with an on-chip antenna, a dc voltage limiter, two voltage sensors, a low dropout voltage regulator, and MOSCAP based on-chip storage. The chip has been designed and fabricated in a standard 0.18-μm CMOS technology. To emulate the eye environment in measurements, a custom test setup is developed that comprises Plexiglass cavities filled with saline solution. Measurements in this setup show that the proposed chip can be charged to 1 V wirelessly from a 5-W transmitter 3 cm away from the harvester chip. The energy that is stored on the 5-nF on-chip MOSCAP when charged to 1 V is 2.5 nJ, which is sufficient to drive an arbitrary 100-μW load for 9 μs at regulated 0.8 V. Simulated efficiency of the rectifier is 42% at -7 dBm of input power.