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Impact of Underwater Laser Annealing on Polycrystalline Silicon Thin-Film Transistor for Inactivation of Electrical Defects at Super Low Temperature

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6 Author(s)
Machida, E. ; Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Japan ; Horita, M. ; Yamasaki, K. ; Ishikawa, Y.
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