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Single-crystal LaB6 tip as electron source for high-throughput electron beam lithography

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5 Author(s)
Eiji Rokuta ; Faculty of Science and Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku, Nagoya 468-8502, Japan ; Hidekazu Murata ; Hiroshi Shimoyama ; Hiroshi Yasuda
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