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Scaling of Trigate Junctionless Nanowire MOSFET With Gate Length Down to 13 nm

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10 Author(s)
Barraud, S. ; LETI, Commissariat a l''Energie Atomique et aux Energies Alternatives, Grenoble, France ; Berthome, M. ; Coquand, R. ; Casse, M.
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