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A Comparative Study of Surface-Roughness-Induced Variability in Silicon Nanowire and Double-Gate FETs

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5 Author(s)
Alessandro Cresti ; Institut de Microélectronique, Electromagnétisme et Photonique–Laboratoire d'Hyperfréquences et de Caractérisation (Unité Mixte de Recherche Centre National de la Recherche Scientifique/Institut National Polytechnique de Grenoble/Université Joseph Fourier 5130), Grenoble INP Minatec, Grenoble, France ; Marco G. Pala ; Stefano Poli ; Mireille Mouis
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