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Productivity improvement for a Zr-base high-k film deposition using thermal chamber cleaning technique

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6 Author(s)
Hirohisa Yamazaki ; Hitachi Kokusai Electric Inc., 12-1 Yasuuchi, Yatsuo-machi, Toyama-city, 939-2393, Japan ; Masanori Sakai ; Hironobu Miya ; Toshinori Shibata
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