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Design, Simulation, and Characterization of Variable Inductor With Electrostatic Actuation Fabricated by Using Surface Micromachining Technology

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4 Author(s)
Dong-Ming Fang ; Nat. Key Lab. of Nano/Micro Fabrication Technol., Peking Univ., Beijing, China ; Xiu-Han Li ; Quan Yuan ; Hai-Xia Zhang