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Atomic scale characterization of titanium Ohmic contacts to SiC using three dimensional atom probe tomography and high resolution transmission electron microscopy

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6 Author(s)
Maneshian, M.H. ; Department of Materials Science and Engineering and Center for Advanced Research and Technology, University of North Texas, Denton, Texas 76207, USA ; Mahdak, K.C. ; Kuo, F.L. ; Hwang, J.Y.
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