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The MEMCAD system enables the designer of Optical Micro-Electro-Mechanical Systems to explore interesting design spaces in simulation. In this paper we investigate the space of torsional micromirrors and explore three specific micromirror designs.
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Date of Conference:
5-9 Aug. 1996
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