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Crystalline silicon surface passivation by high-frequency plasma-enhanced chemical-vapor-deposited nanocomposite silicon suboxides for solar cell applications

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3 Author(s)
Mueller, T. ; University of Hagen, Chair of Electronic Devices, P.O.B. 940, Haldener Strasse 182, 58084 Hagen, Germany ; Schwertheim, S. ; Fahrner, W.R.