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Wafer-Scale Manufacturing of Bulk Shape-Memory-Alloy Microactuators Based on Adhesive Bonding of Titanium–Nickel Sheets to Structured Silicon Wafers

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4 Author(s)
Stefan Braun ; Microsyst. Technol. Lab., R. Inst. of Technol., Stockholm, Sweden ; Niklas Sandstrom ; GÖran Stemme ; Wouter van der Wijngaart