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Self-Aligned Planar Double-Gate MOSFETs by Bonding for 22-nm Node, With Metal Gates, High- \kappa Dielectrics, and Metallic Source/Drain

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16 Author(s)
M. Vinet ; CEA-LETI/Minatec, Grenoble ; T. Poiroux ; C. Licitra ; J. Widiez
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