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Development of a Novel MEMS Inertial Switch With a Compliant Stationary Electrode

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4 Author(s)
Haogang Cai ; Key Lab. for Thin Film & Microfabrica- tion Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., Shanghai ; Zhuoqing Yang ; Guifu Ding ; Hong Wang