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Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

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5 Author(s)
Rousseau, A. ; Laboratoire de Physique des Gaz et des Plasmas, CNRS, Université Paris-Sud, Bâtiment 210, 91405 Orsay Cedex, France ; Teboul, E. ; Lang, N. ; Hannemann, M.
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