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Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH4/H2 capacitively coupled radio frequency discharge

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6 Author(s)
Ivanov, Vladimir ; Skobeltsyn Institute of Nuclear Physics, Moscow State University, Vorob’evi Gori, Moscow 119899, Russia ; Proshina, Olga ; Rakhimova, Tatyana ; Rakhimov, A.
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