By Topic

Nanoscale layer etching by short-time exposure of substrates to gas discharges using moving patterned shutter

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Oehrlein, G.S. ; Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742 and Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742 ; Hua, X. ; Stolz, C. ; Jiang, P.