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Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams

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6 Author(s)
Lehrer, C. ; Fraunhofer Institut fuer Integrierte Systeme und Bauelementetechnologie, Schottkystrasse 10, D-91058 Erlangen, Germany ; Frey, L. ; Petersen, S. ; Ryssel, H.
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