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Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor–dielectric interfaces and (ii) internal interfaces in stacked dielectrics

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5 Author(s)
Lucovsky, G. ; Departments of Physics and Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695-8202 ; Yang, H. ; Niimi, H. ; Thorpe, M.F.
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