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Fabrication of x-ray mask from a diamond membrane and its evaluation

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8 Author(s)
Noguchi, H. ; Advanced Functional Materials Research Center, Shin-Etsu Chemical Co., Ltd., 2-13-1 Isobe, Annaka-shi, Gunma 379-0195, Japan ; Kubota, Y. ; Okada, I. ; Oda, M.
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