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Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature

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6 Author(s)
Lee, Jin Ho ; Semiconductor Technology Division, Electronics and Telecommunications Research Institute, Yusong P.O. Box 106, Taejon 305-600, Korea ; Song, Yoon-Ho ; Kang, Seung-Youl ; Cho, Kyoung Ik
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