Skip to Main Content
Your organization might have access to this article on the publisher's site. To check,
click on this link:http://dx.doi.org/+10.1116/1.588330
Diamond is a very attractive material for x‐ray mask membranes since it has high Young’s modulus, high transmission under exposure to soft x rays (in the exposure wavelength region of 0.5–1.5 nm), and good thermal conductivity. However, there remains a drawback of synchrotron radiation damage. Microwave plasma chemical vapor deposition diamond membranes under several kinds of deposition conditions have been evaluated. It is found that x rays attack only the nondiamond component of the membrane, and a diamond membrane having good crystallinity shows high x‐ray irradiation durability. © 1995 American Vacuum Society
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.