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Quantitative study of hydrogen-implantation-induced cavities in silicon by grazing incidence small angle x-ray scattering

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4 Author(s)
Capello, L. ; DRFMC, CEA-Grenoble, 17, Rue des Martyrs, 38054, Grenoble, France ; Rieutord, F. ; Tauzin, A. ; Mazen, F.