Skip to Main Content
IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards,
eBooks, and eLearning courses.
Learn more about:
IEEE Xplore subscriptions
Your organization might have access to this article on the publisher's site. To check,
click on this link:http://dx.doi.org/+10.1116/1.1513638
The adsorption and growth of Ti on Si(111)-7×7 surface at room temperature was studied with x-ray standing waves and high energy x-ray photoelectron spectroscopy. The surface morphology of the specimens was analyzed using atomic force microscopy. We observed that at the submonolayer (0.08–0.24 ML) coverage a significant fraction of the metal atoms are coherently located in the near-surface interstitial positions of the Si lattice. For a higher Ti coverage (1.8 ML), the coherently ordered fraction almost vanishes and the surface is covered with three-dimensional islands. The Ti-coverage results are interpreted in terms of an interfacial transition layer containing Ti interstitials below the Si surface at low coverage, and a disordered mixed Ti–Si phase at higher Ti concentration. © 2002 American Vacuum Society.
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.