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Phase-shift interference microscope employing a simple method to depress speckle noises for the thickness measurement of thin films

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4 Author(s)
Matsumoto, Shigeaki ; Department of Information Engineering, The Polytechnic University, Hashimotodai, Sagamihara, Kanagawa 229-11, Japan ; Takayama, Kinya ; Toyooka, Satoru ; Kikuchi, Akira