Skip to Main Content
Your organization might have access to this article on the publisher's site. To check,
click on this link:http://dx.doi.org/+10.1063/1.126549
A microfabricated cantilever with integrated comb-shape electrostatic actuator is proposed to yield a high-speed feedback motion in atomic force microscopy with optical deflection detection. The actuator has a linear response to the driving voltage. The dynamic range of tip amounts to 1 μm with an actuation efficiency of 11.4 nm/V. Using this cantilever, an imaging bandwidth of ∼80 kHz was obtained. High-speed constant force imaging with a tip velocity of 1.22 mm/s is demonstrated. The tip-sample force is verified to be constant by using a cantilever with an integrated piezoresistor as the scanned sample. © 2000 American Institute of Physics.
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.© Copyright 2015 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.