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Low-loss optical waveguides based on a negative tone epoxy Novolak resin polymer have been fabricated using electron-beam direct writing. This polymer has a high refractive index, high sensitivity, large hardness, and Tg≫200 °C. For single-mode channel waveguides with upper claddings, the propagation losses measured were 0.22 and 0.48 dB/cm at 1330 and 1550 nm, respectively. For waveguides without upper claddings, the losses were 0.5 dB/cm at both wavelengths. The stability of these waveguides was also investigated, and no significant change was observed after 200 h at 90 °C and 95% relative humidity. © 2001 American Institute of Physics.
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