Nonradiative photoluminescence (PL) lifetime (τnr) and point defect density in the (0001)ZnO epilayer grown on (111)Si substrates by laser-assisted molecular-beam epitaxy (L-MBE) using a (0001)ZnS epitaxial buffer layer were compared with those in the ZnO films on (111) and (001)Si substrates prepared by direct transformation of ZnS epilayers on Si by thermal oxidation [Yoo etal, Appl. Phys. Lett. 78, 616 (2001)]. Both the ZnO films exhibited excitonic reflectance anomalies and corresponding PL peaks at low temperature, and the density or size of vacancy-type point defects (Zn vacancies), which were measured by the monoenergetic positron annihilation measurement, in the L-MBE epilayer was lower than that in the films prepared by the oxidation transformation. The ZnO epilayer grown on a (0001)ZnS epitaxial buffer on (111)Si exhibited longer τnr of 105ps at room temperature.