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Comparative study of the properties of ultrathin Si3N4 films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy

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4 Author(s)
Paloura, E.C. ; Aristotle University of Thessaloniki, Physics Department 313‐1, GR‐54006, Thessaloniki, Greece ; Logothetidis, S. ; Boultadakis, S. ; Ves, S.