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Observation of individual dopants in a thin silicon layer by low temperature Kelvin Probe Force Microscope

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6 Author(s)
Ligowski, Maciej ; Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Nakaku, Hamamatsu 432-8011, Japan ; Moraru, D. ; Anwar, Miftahul ; Mizuno, T.
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