Precision positioning machines are required to run with higher speed and higher accuracy. The high running speed can cause strong excitations on the machine structure, which results in severe structure vibration and long settling time. This paper presents a low-vibration motion profile generation method to reduce the residual vibration. The acceleration profile is designed by using a level-shifted sinusoidal waveform to have an s-shape in order to control its change rate. Simulation and experimental studies showed that in comparison with conventional trapezoidal profile and s-curve profile, the residual vibration by using the proposed motion profile can be reduced significantly.