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A New Liner Stressor with Very High Intrinsic Stress (≫ 6 GPa) and Low Permittivity Comprising Diamond-Like Carbon (DLC) for Strained P-Channel Transistors

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11 Author(s)
Kian-Ming Tan ; Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singapore (NUS), 117576. ; Ming Zhu ; Wei-Wei Fang ; Mingchu Yang
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